Property / Orientation | C-plane (0001) | A-plane (11-20) | R-plane (1-102) |
---|---|---|---|
Symmetry | Hexagonal, high | Planar symmetry | Asymmetric |
Epitaxial Suitability | Ideal for GaN/Ga₂O₃ | Used for ZnO | Suited for some YBCO films |
Process Maturity | Very mature | Moderate | Less developed |
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